Probe-type step profiler for measuring film thickness

Zhongtu Instrument NS200 Stylus Profiler for Thin Film Thickness Measurement is an ultra-precision contact-based microscopic profile measuring instrument, primarily used for measuring micro-topography parameters such as step height, film thickness, and surface roughness.

Stylus Profiler for Thin Film Thickness Measurement typically uses a diamond stylus with a 2μm radius to measure these small features. A precision XY stage, combined with the scanning axis R and rotary stage θ, moves the sample under the stylus. The vertical displacement of the stylus is converted into electrical signals corresponding to the feature dimensions. These electrical signals are then transformed into a digital format, where they can be displayed on a computer screen and manipulated to determine various analytical information about the substrate. The scan length and scan speed can be finely adjusted to increase or decrease analysis time and resolution. Additionally, the measuring force is adjustable to accommodate hard or soft material surfaces.

Structure

Main Components

1. Measurement System

（1）Single-arch gantry design ensures excellent structural stability, reducing the impact of ambient acoustic and vibration noise on measurement signals, thereby improving measurement accuracy.

（2）Linear Variable Differential Capacitance (LVDC) sensor with sub-angstrom resolution, achieving 0.01 angstroms within a 13μm range. High signal-to-noise ratio and low linear error enable the instrument to scan topographic features from a few nanometers to several hundred micrometers.

（3）The sensor design allows for ultra-micro and normal force measurements on a single platform. The measuring force is constantly adjustable to suit hard or soft material surfaces. Ultra-low inertia design and micro electromagnetic force control enable precise contact measurements without surface damage.

2. Workstage

（1）A precision XY stage combined with a 360° continuously rotating electric rotary stage allows adjustment of the sample's position and angle. Three-dimensional positioning is fully adjustable, facilitating sample alignment.

（2）Ultra-high straightness guide rails effectively minimize subtle vibrations during movement, enhancing scanning accuracy and truly reflecting the micro-topography of the workpiece.

3. Imaging System

A 5-megapixel high-resolution color camera enables real-time high-precision positioning measurements. It transmits the stylus topography image to the control computer, making measurements more intuitive.

4. Software System

The measurement software includes multiple modules.

5. Vibration Damping System

Prevents the influence of minor vibrations on measurement results, ensuring more accurate experimental data.

The NS200 Stylus Profiler for Thin Film Thickness Measurement employs a Linear Variable Differential Capacitance (LVDC) sensor with ultra-micro force adjustment capability and sub-angstrom resolution. It integrates core technologies such as ultra-low noise signal acquisition, ultra-fine motion control, and calibration algorithms, endowing the instrument with exceptionally high measurement accuracy and repeatability. It offers strong adaptability to various application scenarios, with no special requirements for the sample's reflectivity, material type, or hardness.

Product Functions

1. Parameter Measurement Functions

1) Step Height: Capable of measuring step heights from nanometers to 330μm or 1050μm, accurately measuring materials deposited or removed during processes such as etching, sputtering, SIMS, deposition, spin coating, and CMP.

2) Roughness and Waviness: Can measure sample roughness and waviness. The analysis software calculates the scanned micro-profile curve to obtain dozens of parameters related to roughness and waviness, such as Ra, RMS, Rv, Rp, and Rz.

3) Stress Measurement: Can measure surface stress of various materials.

2. Measurement Modes and Analysis Functions

1) Single-Area Measurement Mode: After focusing, set the scan starting point and scan length based on the image navigation map to begin measurement.

2) Multi-Area Measurement Mode: After focusing, set a single-area scan path based on the image navigation map. Array multiple to hundreds of scan paths based on horizontal and vertical distances to form a multi-area measurement mode. Automatically measure all scan paths with a single click.

3) 3D Measurement Mode: After focusing, set a single-area scan path based on the image navigation map. Configure the entire scan area based on the required scan width or the spacing and number of scan lines. Automatically complete the scanning and 3D image reconstruction of the entire area with a single click.

4) SPC Statistical Analysis: Supports analysis of various indicator parameters for different types of samples. Provides SPC charts for batch sample measurement data to track statistical trends.

3. Dual-Navigation Optical Imaging Function

The NS200-D model is equipped with a 5-megapixel color camera for front or oblique view. The front-view navigation system allows precise scan path setting, while the oblique-view navigation system enables real-time tracking of the scan trajectory.

4. Quick Stylus Replacement Function

Uses a magnetic stylus for quick on-site replacement when needed. Rapid calibration is performed via the software's calibration module to ensure accuracy and repeatability after replacement, reducing maintenance efforts.

Physical appearance of the magnetic stylus (330μm range)

Application Scenarios

Partial Technical Parameters

Operating Environment

Relative Humidity: 30-40% RH (No Condensation)

Temperature: 16-25°C (Temperature change less than 2°C per hour)

Ground Vibration: 6.35μm/s (1-100Hz)

Audio Noise: ≤80dB

Air Laminar Flow: ≤0.508 m/s (Downward Flow)

Please note: Due to market developments and product development needs, the content in this product documentation may be updated or modified at any time without prior notice. We appreciate your understanding.

For any questions or further details, please feel free to contact Zhongtu Instrument for consultation.